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Fully automatic contact angle and surface tension measuring instrument Measuring field: (200 x 200) mm | ||
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Download pdf-File Watch demo video "SURFTENS-automatic"
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Features The contact angle meter SURFTENSautomatic is designed for use in semiconductor industry and research, in particular for process control of wafer coating and in the photolithographic process. It is characterized by the following features: - fast and easy measurement of contact angle; - space-saving construction - motorized x/y stage for automatic specimen positioning - motorized, automatic dispensation system - software with intuitive operation - comfortable documentation of the measuring results in protocols and in the video images; - if required computation of free surface energy by the theory of Wu; - automatic mappings of contact angle distribution onthe wafer surface;
Fastest measuring of contact angle and homogeneity SURFTENS automatic has been specially developed for use in clean-rooms where it excels due to small size, short cycle time and simple operation. The SURFTENS-software automatically measures contact angle with one keystroke. The stepping motor driven x/y-stage guarantees the contact angle measurement on any point on the wafer quickly. SURFTENS measures the homogeneity of surface properties in only a few seconds. Print-out of the measuring results is just as simple and fast, and data can be transferred to QA software or configured for other formats. Highest accuracy with automatic measuring functions
The drop of
measuring liquid is produced by the built-in, automatic drop dispenser (dispense
volume free definable). The image of the drop appears immediately as a
high-quality, live video picture on the PC screen. Measuring is started by a
single keystroke. The software determines the contact angle and immediately
presents it graphically as with numerical data included. Fast measuring times of
only 1 second per drop exclude errors. SURFTENS™ guarantees highest
reproducibility and measuring accuracy combined with ease of operation. In the
case of poor contrast images, a manual measuring function can be used.
SURFTENS™ automatic is a fully automatic system with automatic drop
dispensing and a stepper-motor driven table for larger surfaces such as
flat-panel substrates and 8" and 12" wafers. SURFTENS™ can also be used to
measure the surface-tension of solids and liquids. With SURFTENS you solve your adhesion problems Surface tension of substrates and layers used in semiconductor technology as well as surface tension of photolithography as resists and developers were determined by contact angle measurement. Measuring the contact angle allows you to quickly optimize new process steps as well as to better standardize known processes. Small changes in the surface property of wafers are seen as large,easily detected changes in the contact angle. A small investment of time used to measure the contact angle can give a large return by avoiding later production problems (picture on the right: resist ablation due to undetected adhesion problems). To reduce defect density and feature sizes of resist structures <1µm a good adhesion of the resist is necessary. By help of contact angle you can control the adhesion very easily.
Technical parameters Video-Ba Contact angle measuring device for the fully automatic measurement of the wetting behaviour of solids (e.g. wafers or glass substrates for flat panel displays) under clean-room conditions, as well as for series tests and systematic analysis. The SURFTENS automatic enables the reduction of subjective factors and time involved for contact angle measurements in research, quality- and production inspection. SURFTENS serves for the software-controlled measurement and analysis of: The SURFTENS automatic consists of the basic instrument with the following technical equipment:
Measurement options: Technical data SURFTENS automatic
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SURFTENS automatic
sed Automatic Contact Angle Meter