FLATSCAN  provides highly accurate, non contact Thickness / Flatness measurement of glass substrates (masks, glass wafers).
 

 
High resolution thickness sensor guarantees precise measurements
 
Basis of the measuring instrument is the high resolution thickness sensor CAS for transparant objects. Comfortable Windows-Software allows single measurements and automatic thickness mappings The comfortable Windows software controls the measuring and
offers graphical and numerical data evaluation and representation, for instance 3D-representation of thickness distributions and sectional views.
The measuring results can be stored in freely configurable measuring protocols or in ASCII-Files.
 
The standard measuring field is (150 x 150) mm. Any other measuring field is possible.
 
Technical Data
Positioning resolution: 10 µm
Measuring accuracy:  1 µm
Measuring field: (150 x 150) mm
Free working distance: 22 * 5 mm
Measuring wavelength: 670 nm
Software:runs under Windows
 
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