Glass thickness sensor CAS
 
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Sensor head for highly accurate distance and thickness measurement with large working distance for rough and polished surfaces with numerous possibilities of use like glass thickness measurement, 3D-flatness measurement, wafer thickness measurment
 
 

1. Sensor head
 

 

The measuring head contains a laser, a projection objective, a measuring objective, a miniature CCD-matrix camera with 440.000 Pixel resolution.
The standard version CAS-30/30 uses a symmetrical beam, which optical axis of the projection and of the measuring objective form with the surface-normal of the surface both an angle of 30 degree. A shift of the specimen surface in measuring direction (dz) causes a shift of the measuring signal on the CCD matrix around the way dx. The way dx is measured with subpixel resolution by the image processing system. By help of a highly accurate calibration a resolution of 0,1 micron can be reached with a free work distance of 22 ± 5mm.
 


2. Evaluation of the measuring signal
The image processing system COMEF_CAS consisting of software, PC and frame grabber is used for data akquisition and –evaluation. The software is very comfortable and easy to use. The measured values can be both sequentially displayed and stored in freely configurable protocols. The calibration of the measuring system can take place via the user. The evaluation software is adapted special to the application in connection with the CAS distance sensor and supplies by its efficient algorithms for the highly exact determining position of objects highly exact results of measurement.
 


3. Technical data of CAS-30/30 sensor
Size: (155 x 55 145) mm
Weight: 400 g
Free working distance: 22 ± 5 mm
Power supply: extern, 5V and 12V DC
Working distance: 670 nm
Measuring time: depending from PC, measuring field and choosed filters between 0,1 and 0,5 seconds

 

  Polished surfaces Rough surfaces
Resolution 0,05 µm 0,1 µm
Accuracy in every 100 µm measuring range ± 0,2 µm ± 0,25µm
Accuracy over the whole measuring range ± 0,5 µm ± 2µm
Measuring range 800 µm ± 400 µm 600 µm ± 300 µm

 
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